JPH0449146Y2 - - Google Patents
Info
- Publication number
- JPH0449146Y2 JPH0449146Y2 JP15082587U JP15082587U JPH0449146Y2 JP H0449146 Y2 JPH0449146 Y2 JP H0449146Y2 JP 15082587 U JP15082587 U JP 15082587U JP 15082587 U JP15082587 U JP 15082587U JP H0449146 Y2 JPH0449146 Y2 JP H0449146Y2
- Authority
- JP
- Japan
- Prior art keywords
- processing liquid
- silicon oxide
- liquid
- oxide film
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 151
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 52
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 47
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 38
- 238000001914 filtration Methods 0.000 claims description 27
- 238000004519 manufacturing process Methods 0.000 claims description 26
- 238000007654 immersion Methods 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 18
- 238000007598 dipping method Methods 0.000 claims description 14
- 239000007864 aqueous solution Substances 0.000 claims description 5
- 239000002253 acid Substances 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 239000000243 solution Substances 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 6
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 5
- 239000004327 boric acid Substances 0.000 description 5
- 238000003860 storage Methods 0.000 description 4
- LRCFXGAMWKDGLA-UHFFFAOYSA-N dioxosilane;hydrate Chemical compound O.O=[Si]=O LRCFXGAMWKDGLA-UHFFFAOYSA-N 0.000 description 2
- 239000006260 foam Substances 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Landscapes
- Degasification And Air Bubble Elimination (AREA)
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15082587U JPH0449146Y2 (en]) | 1987-10-01 | 1987-10-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15082587U JPH0449146Y2 (en]) | 1987-10-01 | 1987-10-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0158631U JPH0158631U (en]) | 1989-04-12 |
| JPH0449146Y2 true JPH0449146Y2 (en]) | 1992-11-19 |
Family
ID=31424312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15082587U Expired JPH0449146Y2 (en]) | 1987-10-01 | 1987-10-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0449146Y2 (en]) |
-
1987
- 1987-10-01 JP JP15082587U patent/JPH0449146Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0158631U (en]) | 1989-04-12 |
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